Semiconductor manufacturing
Plasma, dry etch, CVD and wet-clean tools. Low-extractable compounds for chamber seals, valve seats and gas-line fittings.
Aperflu 2275 FFKM O-rings keep sealing where FKM, EPDM and silicone fail — in aggressive chemicals, high temperatures, vacuum and steam. Typical fields of use below.
Plasma, dry etch, CVD and wet-clean tools. Low-extractable compounds for chamber seals, valve seats and gas-line fittings.
Pumps, compressors, reactors, mixers and valves handling hot organic and inorganic acids, caustics, ketones, esters and mixed process streams.
Sour gas, amines, hydrocarbons and steam service where FKM and EPDM fail. Downhole tools, wellhead seals, sub-sea connectors.
Steam-in-place and clean-in-place exposure, aggressive cleaning agents and active pharmaceutical ingredients.
Dispensers, sprayers, quick-connect couplings and instrumentation exposed to solvents and pigments.
Fuel, hydraulic fluid and solvent resistance across a wide temperature window with low compression set.
Send us the chemicals, temperature and pressure — we will select the compound for you.
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